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›› 2002, Vol. 2 ›› Issue (6): 0-0.

• 6 •    

微波等离子体化学合成纳米粉体材料研究与应用

黄生乔,马兵   

  1. 中国科学院过程工程研究所,北京 100080
  • 出版日期:2002-12-20 发布日期:2002-12-20

Research and Application of Synthesis of Nanopowders by Microwave Plasma-enhanced Chemical Vapor Deposition Method

HUANG Sheng-qiao, MA Bing   

  1. Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100080, China
  • Online:2002-12-20 Published:2002-12-20

摘要: 介绍了微波等离子体化学合成技术的原理和特点,分析了微波等离子体化学合成纳米粉体材料相对于其它方法的特点和优势. 综述了微波等离子体化学法合成纳米粉体材料这一领域国内外的最新研究与应用情况.

关键词: 微波等离子体, 化学气相沉积, 纳米材料

Abstract: The principle and some characteristics of MPECVD technology were reviewed. The superiorities of nanopowders synthesis by MPECVD over other methods were analyzed. Some recent development of synthesis of nanopowders by MPECVD in China and other countries were reviewed.

Key words: microwave plasma, chemical vapor deposition, nanopowders

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