化学机械抛光中保持环对抛光液利用率影响的有限元模拟
屈朋阳 黄盼 练成 林绍梁 刘洪来
Finite element simulation of the effect of retaining ring on the slurry effective utilization in chemical mechanical polishing
Pengyang QU Pan HUANG Cheng LIAN Shaoliang LIN Honglai LIU
过程工程学报
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2023, (12): 1637
-1645
.
DOI: 10.12034/j.issn.1009-606X.222460
