Abstract: With the development of electronics and the continuous progress of micromanufacturing technology, micro-scale distillation technology as an effective means of chemical enhancement is used to solve the problems existing in the distillation process such as large size, low energy utilization efficiency, difficult to separate the systems with low relative volatility. When the scale is reduced, the depth of liquid channel and the mass transfer distance are also reduced, and the mass transfer efficiency between gas-liquid or liquid-liquid is enhanced significantly. The fractionation by use of micro-distillation equipment has a very low height equivalent to a theoretical plate. At the same time, the heat transfer can be more accurately controlled under the premise of an excellent temperature control system, which is conducive to reducing the occurrence of side reactions for the thermal sensitive system. In this work, five main micro-distillation methods, including gravity micro-distillation, carrier gas micro-distillation, vacuum micro-distillation, capillary force micro-distillation and centrifugal force micro-distillation, were introduced. Their structural characteristics, advantages and disadvantages were compared and discussed, and the manufacturing technology of micro-distillation equipment was systematically introduced. Micro-scale distillation technology has special advantages, which can provide a new idea for the development of modern chemical rectification towards the goal of consumption reduction, environmental protection and intensification.

Key words: micro-scale, microchannels, distillation, separation, transport processes

摘要： 随着电子学的发展和微制造技术的不断进步，微尺度蒸馏技术作为一种有效的化工强化手段，可用于解决蒸馏工艺存在的设备庞大、能量利用效率低以及对于相对挥发度较低的体系分离困难等问题。当尺度减小后，液体通道的深度和传质距离也随之减少，气-液或液-液间的传质效率显著增强。利用微蒸馏设备进行分离具有极低的等板高度；同时，在具有优良控温系统的前提下可以对传热进行更精准地控制，有利于减少热敏体系中副反应的发生。本综述分别介绍了重力微蒸馏、载气微蒸馏、真空微蒸馏、毛细(管)力微蒸馏和离心力微蒸馏五种主要的微尺度蒸馏方法，比较和讨论了每种方法的结构特征及其优缺点，并对微蒸馏设备的加工制造技术进行了系统介绍。微尺度蒸馏技术具有特殊的优势，能够为现代化工蒸馏向着降耗、环保、集约化的目标发展提供新思路。

关键词: 微尺度, 微通道, 蒸馏, 分离, 传递过程