Experimental Study on Hydrogenation of SiCl4 to SiHCl3 in a Stirred Bed React

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Experimental Study on Hydrogenation of SiCl4 to SiHCl3 in a Stirred Bed Reactor

LI Qing-yuan LI Pei-long WANG Tie-feng

Chin. J. Process Eng. . 2016, (5): 767 -773 . DOI: 10.12034/j.issn.1009-606X.216160

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