<span>直拉式单晶炉<span>PDE降维模型的生长界面温度控制</span></span>

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Interface Temperature Control of Czochralski Crystal Furnace Based on Novel Reduced Order PDE Model

Qiran CONG Peng YAN

Chin. J. Process Eng. . 2017, (3): 571 -577 . DOI: 10.12034/j.issn.1009-606X.216331

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