多晶硅生产用煤基高纯石墨性能及应用

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Properties and application of coal-based high purity graphite in polysilicon preparation

Qili WANG Fengtao ZHANG Xiaofeng GAO Jianwen HU

Chin. J. Process Eng. . 2021, (3): 323 -331 . DOI: 10.12034/j.issn.1009-606X.220030

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