流态化气相沉积过程中稀释气体流量对颗粒表面SiO <sub>2</sub>沉积的影响

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Influence of the dilution gas flow rate on SiO ₂ deposition on the powder surface during the fluidized vapor deposition

Zhaoyang WU Zihan GAO Hui KONG Chen XIAN Jixiang JIA Xiangwei LIAO

The Chinese Journal of Process Engineering . 2021, (8): 959 -968 . DOI: 10.12034/j.issn.1009-606X.220257

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