化学机械抛光中保持环对抛光液利用率影响的有限元模拟

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Finite element simulation of the effect of retaining ring on the slurry effective utilization in chemical mechanical polishing

Pengyang QU Pan HUANG Cheng LIAN Shaoliang LIN Honglai LIU

The Chinese Journal of Process Engineering . 2023, (12): 1637 -1645 . DOI: 10.12034/j.issn.1009-606X.222460

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