欢迎访问过程工程学报, 今天是
直拉式单晶炉PDE降维模型的生长界面温度控制
丛其然 闫鹏
Interface Temperature Control of Czochralski Crystal Furnace Based on Novel Reduced Order PDE Model
Qiran CONG Peng YAN
过程工程学报 . 2017, (3): 571 -577 .  DOI: 10.12034/j.issn.1009-606X.216331